Capacity modelling of a wet bench cluster tool with material handling robot

Basit Öğe Kaydı
dc.contributor.authorKabak, Kamil Erkan
dc.contributor.authorHeavey, Cathal
dc.contributor.authorCorbett, Vincent
dc.date.accessioned2024-03-13T10:35:23Z
dc.date.available2024-03-13T10:35:23Z
dc.date.issued2012
dc.departmentİstanbul Beykent Üniversitesien_US
dc.description.abstractIn this study, a wet bench cluster is examined through a highly detailed simulation model to first understand the tool performance under different process mixes and lot arrival patterns and second to improve the tool performance using different recipe sequences and loading policies. Results of the simulation experiments show that there is benefit in rationalising the number of recipes to increase the opportunity for full loads. In addition, the wet bench capacity is significantly improved by reconfiguration of recipe sequences. The article demonstrates the successful use of a detailed simulation model of a wet bench cluster tool to support process engineering changes.en_US
dc.identifier.doi10.1080/0951192X.2012.667156
dc.identifier.endpage1046en_US
dc.identifier.issn0951-192X
dc.identifier.issn1362-3052
dc.identifier.issue11en_US
dc.identifier.scopus2-s2.0-84867765284en_US
dc.identifier.scopusqualityQ1en_US
dc.identifier.startpage1029en_US
dc.identifier.urihttps://doi.org/10.1080/0951192X.2012.667156
dc.identifier.urihttps://hdl.handle.net/20.500.12662/4405
dc.identifier.volume25en_US
dc.identifier.wosWOS:000209144400004en_US
dc.identifier.wosqualityQ2en_US
dc.indekslendigikaynakWeb of Scienceen_US
dc.indekslendigikaynakScopusen_US
dc.language.isoenen_US
dc.publisherTaylor & Francis Ltden_US
dc.relation.ispartofInternational Journal Of Computer Integrated Manufacturingen_US
dc.relation.publicationcategoryMakale - Uluslararası Hakemli Dergi - Kurum Öğretim Elemanıen_US
dc.rightsinfo:eu-repo/semantics/closedAccessen_US
dc.subjectwet benchen_US
dc.subjectsemiconductor manufacturingen_US
dc.subjectcapacity modellingen_US
dc.subjectsimulationen_US
dc.subjectmaterial handling roboten_US
dc.titleCapacity modelling of a wet bench cluster tool with material handling roboten_US
dc.typeArticleen_US

Dosyalar

Koleksiyon

WoS İndeksli Yayınlar Koleksiyonu
Scopus İndeksli Yayınlar Koleksiyonu