SINGLE TOOLSET MODELING APPROACHES IN SEMICONDUCTOR MANUFACTURING
| dc.contributor.author | Kabak, Kamil Erkan | |
| dc.contributor.author | Heavey, Cathal | |
| dc.contributor.author | Kernan, Brian | |
| dc.date.accessioned | 2024-03-13T10:30:34Z | |
| dc.date.available | 2024-03-13T10:30:34Z | |
| dc.date.issued | 2012 | |
| dc.department | İstanbul Beykent Üniversitesi | en_US |
| dc.description | Winter Simulation Conference (WSC) -- DEC 09-12, 2012 -- Berlin, GERMANY | en_US |
| dc.description.abstract | Traditional industrial engineering techniques including mathematical models are not sufficient to examine sophisticated manufacturing systems such as semiconductor manufacturing. As such, simulation modeling is used extensively in the design and analysis of semiconductor manufacturing operations. This study explores the use of simulation modeling of single semiconductor toolsets. In the literature a number of modeling approaches for single toolset analysis can be identified. The purpose of this study is to review and evaluate these approaches. | en_US |
| dc.identifier.isbn | 978-1-4673-4779-2 | |
| dc.identifier.isbn | 978-1-4673-4780-8 | |
| dc.identifier.issn | 0891-7736 | |
| dc.identifier.uri | https://hdl.handle.net/20.500.12662/3431 | |
| dc.identifier.wos | WOS:000319225502016 | en_US |
| dc.identifier.wosquality | N/A | en_US |
| dc.indekslendigikaynak | Web of Science | en_US |
| dc.language.iso | en | en_US |
| dc.publisher | IEEE | en_US |
| dc.relation.ispartof | 2012 Winter Simulation Conference (Wsc) | en_US |
| dc.relation.publicationcategory | Konferans Öğesi - Uluslararası - Kurum Öğretim Elemanı | en_US |
| dc.rights | info:eu-repo/semantics/closedAccess | en_US |
| dc.title | SINGLE TOOLSET MODELING APPROACHES IN SEMICONDUCTOR MANUFACTURING | en_US |
| dc.type | Conference Object | en_US |
