Single toolset modeling approaches in semiconductor manufacturing

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dc.contributor.authorKabak K.E.
dc.contributor.authorHeavey C.
dc.contributor.authorKernan B.
dc.date.accessioned2024-03-13T10:00:54Z
dc.date.available2024-03-13T10:00:54Z
dc.date.issued2012
dc.departmentİstanbul Beykent Üniversitesien_US
dc.descriptionAssoc. Comput. Mach.: Spec. Interest Group Simul. (ACM/SIGSIM);Institute of Industrial Engineers (IIE);Inst. Oper. Res. Manage. Sci.: Simul. Soc. (INFORMS-SIM);The Society for Modeling and Simulation International (SCS);Arbeitsgemeinschaft Simulation (ASIM)en_US
dc.description2012 Winter Simulation Conference, WSC 2012 -- 9 December 2012 through 12 December 2012 -- Berlin -- 95957en_US
dc.description.abstractTraditional industrial engineering techniques including mathematical models are not sufficient to examine sophisticated manufacturing systems such as semiconductor manufacturing. As such, simulation modeling is used extensively in the design and analysis of semiconductor manufacturing operations. This study explores the use of simulation modeling of single semiconductor toolsets. In the literature a number of modeling approaches for single toolset analysis can be identified. The purpose of this study is to review and evaluate these approaches. © 2012 IEEE.en_US
dc.identifier.doi10.1109/WSC.2012.6465135
dc.identifier.isbn9781467347792
dc.identifier.issn0891-7736
dc.identifier.scopus2-s2.0-84874739099en_US
dc.identifier.scopusqualityN/Aen_US
dc.identifier.urihttps://doi.org/10.1109/WSC.2012.6465135
dc.identifier.urihttps://hdl.handle.net/20.500.12662/2837
dc.indekslendigikaynakScopusen_US
dc.language.isoenen_US
dc.relation.ispartofProceedings - Winter Simulation Conferenceen_US
dc.relation.publicationcategoryKonferans Öğesi - Uluslararası - Kurum Öğretim Elemanıen_US
dc.rightsinfo:eu-repo/semantics/openAccessen_US
dc.titleSingle toolset modeling approaches in semiconductor manufacturingen_US
dc.typeConference Objecten_US

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