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    SINGLE TOOLSET MODELING APPROACHES IN SEMICONDUCTOR MANUFACTURING
    (IEEE, 2012) Kabak, Kamil Erkan; Heavey, Cathal; Kernan, Brian
    Traditional industrial engineering techniques including mathematical models are not sufficient to examine sophisticated manufacturing systems such as semiconductor manufacturing. As such, simulation modeling is used extensively in the design and analysis of semiconductor manufacturing operations. This study explores the use of simulation modeling of single semiconductor toolsets. In the literature a number of modeling approaches for single toolset analysis can be identified. The purpose of this study is to review and evaluate these approaches.